Leading products in optical metrology Made in Germany

Defect Review

Enables re-evaluation of defect data from a previous inspection run

Any defect may be repositioned in the center of the field-of-view of the microscope with a single mouse-click, and then examined closer using the flexible binocular tube and a selection of magnifications on the INM-200 microscope in combination with the stored defect images. (online review). Alternatively the review may use stored images only (offline review). Offline review can be performed on the MueTec system or at any office PC.

Any existing defect classification may be adjusted during online or offline review.

 

Products 

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Argos 300
200mm/300mm Wafer Macro Defect Inspection

Key Features

300 mm FOUP based handling

Data acquisition perfectly balanced to mechanical movements

Simultaneous bright- and darkfield front and backside inspection

Modular design with 1 – 3 process chambers, depending on throughput requirements 

No recipe required for ease of use:
Enables productivity gains through minimum recipe customization
Ideal for fabs and packaging areas with many different devices & die sizes
No knowledge about geometry and physical parameters needed
Die layout data is not necessary
Recognition of active die area and EBR zone
Different sensitivities for different wafer areas
Avoiding false positives at zone transitions
Automatic adjustment of light intensity 
Reflectivity of inspected layer is not necessary
Automatic defect recognition parameters by adaptive software algorithm

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Spector-A
Fully automated mask metrology and inspection system

Typical Applications

CD
Defect Inspection


Features

Mask sizes up to 8“ by 8“

Robot handling

SECS/GEM

VIS, UV

Also available as semi-automated system with manual mask loading (Spector-M)

 

Contact

MueTec Europe

Headquarter

+49 89 1500 169 0

info@muetec.com

Hans-Bunte-Str. 5
80992 Munich / Germany

 

 

Manufacturing

+49 9938 9191-0

info@muetec.com

Isarauer Str. 77
94527 Aholming / Germany