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Defect Review

Enables re-evaluation of defect data from a previous inspection run

Any defect may be repositioned in the center of the field-of-view of the microscope with a single mouse-click, and then examined closer using the flexible binocular tube and a selection of magnifications on the INM-200 microscope in combination with the stored defect images. (online review). Alternatively the review may use stored images only (offline review). Offline review can be performed on the MueTec system or at any office PC.

Any existing defect classification may be adjusted during online or offline review.



MueTec Europe


+49 89 1500 169 0


Hans-Bunte-Str. 5
80992 Munich / Germany




+49 9938 9191-0


Isarauer Str. 77
94527 Aholming / Germany