Enables re-evaluation of defect data from a previous inspection run
Any defect may be repositioned in the center of the field-of-view of the microscope with a single mouse-click, and then examined closer using the flexible binocular tube and a selection of magnifications on the INM-200 microscope in combination with the stored defect images. (online review). Alternatively the review may use stored images only (offline review). Offline review can be performed on the MueTec system or at any office PC.
Any existing defect classification may be adjusted during online or offline review.
Products for Defect Inspection
300mm/200mm metrology and inspection system (FOUP/SMIF)Show details
300mm and 200mm wafer sizes
Fully automated mask metrology and inspection systemShow details
Mask sizes up to 8“ by 8“
Also available as semi-automated system with manual mask loading (Spector-M)