As part of our business model, we serve customers who need metrology and inspection solutions that simply do not exist in the market. Our dedicated group of mechanical engineers, software developers and application engineers listen to your requirements and come up with proposals to solve your challenge.
Examples for customized solutions include fully automated metrology and inspection systems for large area substrates as long as 4 meters in length, as well as customized handling systems or tools that combine many different measurment and inspection functions in one system. Customized solutions represent an important pillar of our business ever since the foundation of the company at the beginning of the 1990ies.
Talk to us for your individual solution.
MT5500 / MT7500
Large area metrology and inspection system
CD > 0,3 micron
contact holes > 0,3 micron
chrome and phase shift
resist on chrome
line edge roughness
substrate size up to 550mm x 550mm
DUV, 248nm; UV 365nm
DUV, UV, VIS
reflected and transmitted light
large area scales
special customized solutionsIndividual Inquiry