Leading products in optical metrology Made in Germany

Macro Defect Inspection

MueTec’s Macro Defect Inspection products are designed for customers with many different wafer types. The system is easy to operate and does not require to write any recipes. It also enables 100% inspection of all wafer during the process of lithography with a throughput that is equal to, or faster that of a lithography cluster. In consequence, we enable our customers to move from sample inspection to inspection of all wafer and from manual inspection by operators to a statistically reliable, automated inspection process. Our tools can easily be setup without using much floor space. Low acquisition and operating costs guarantee a fast return on invest.

Here you can see an example of resist failure and an example resist streaks at lithography.



Macro Defect Inspection

Easy-to-operate: no recipe required

Resolution: 20 micron or 10 micron

100mm, 150mm and 200mm wafer sizes

Patented wafer handling system for throughput of 200 wph

Simultaneous frontside and backside inspection



Enabling 100% wafer inspection at lithography

  • Throughput 200 wafer per hour
  • No recipe required for ease of use
  • Simulaneous wafer frontside and backside inspection
  • Highly cost effective solution for fast return on invest




MueTec Europe


+49 89 1500 169 0


Hans-Bunte-Str. 5
80992 Munich / Germany




+49 9938 9191-0


Isarauer Str. 77
94527 Aholming / Germany