Leading products in optical metrology Made in Germany


Take advantage of MueTec’s experience.

MueTec develops high precision, optical measurement and inspection solutions that help customers in the semiconductor and microelectronics industries to improve their manufacturing yield and overall process control. Our team of technical experts listen to, respond to and anticipate the needs of wafer, reticle and MEMS manufacturers worldwide, offering customized and standard solutions at extremely low maintenance requirements. Scalable systems allow for a combination of many different applications in a single system, including critical dimension, overlay and film thickness measurement as well as defect inspection and review. Over the last 20 years, MueTec has installed 300 measurement and inspection systems around the world.






MueTec Europe


+49 89 1500 169 0


Hans-Bunte-Str. 5
80992 Munich / Germany




+49 9938 9191-0


Isarauer Str. 77
94527 Aholming / Germany