Leading products in optical metrology Made in Germany

Plastic Electronics

The manufacturing of flexible plastic substrates for display applications has made considerable progress. Manufacturing technology is based to a large degree on conventional Si-Technology. In addition to the well established Si-wafer measurement and metrology techiques this new area requires essentially larger wafer stages to accommodate the repsective substrate sizes.


Get in Touch

Reasons to Choose Muetec

Since decades we are listening to your manufacturing challenges and, together with you, find solutions to solve them successfully. You are invited to benefit from our accumulated know how that translates into tools, software algorithms and application support.

The installed base of our tools reaches from volume semiconductor manufacturers to mask shops and research institutes. We installed and service hundreds of tools all around the world. The satisfaction of our customers drives our motivation to exceed their expectations. 

We are proud to provide the flexibility to adopt our solutions to your individual requirements. All of us at MueTec understand that one size does not fit all and we are proud of our ability to adopt to your special needs in a fast and competent fashion.

Our existing customers value the robustness of our tools, many of them being in use for 15 years or longer. All of our tools are designed and manufactured in Germany with highest quality standards.

Our Mission

MueTec serves the semiconductor equipment industry as well as a number of other, closely related industries. Our systems, services and software algorithms help nanoelectronics manufacturers manage yield and minimize waste throughout their manufacturing process, from research and development to final mass production. 

  • Cost-effective solutions
  • Your metrology and inspection specialist
  • Installed base of more than 250 systems
  • Local service and maintenance from certified technicians 

Best Solutions for Plastic Electronics


MT5500 / MT7500
Large area metrology and inspection system


CD > 0,3 micron

contact holes > 0,3 micron

chrome and phase shift

resist on chrome

line edge roughness

substrate size up to 550mm x 550mm

DUV, 248nm; UV 365nm


reflected and transmitted light



large area scales

plastic electronics

glass scales

special customized solutions

Individual Inquiry


MueTec Europe


+49 89 1500 169 0


Hans-Bunte-Str. 5
80992 Munich / Germany




+49 9938 9191-0


Isarauer Str. 77
94527 Aholming / Germany