Leading products in optical metrology Made in Germany

MEMS Solutions

IRIS2000

  • Typical Applications
    • MEMS Sealing Inspection
    • MEMS Device Inspection
    • Overlay/CD Metrology
    • Defect Review using
      IR Techhnology
  • Fully Automatic MEMS Inspection & Metrology using Infrared (IR) illumination
  • High IR image quality
  • Flexible handling options (backside vacuum, flipping, edge-vacuum) for MEMS specific wafers
  • Combined reflected & transmitted light illumination modes for best defect contrast
  • SECS/GEM
  • For further information please contact us

MT3000

  • Typical Applications
    • CD
    • Overlay
    • Film Thickness
    • Defect Inspection
    • Defect Review
  • Fully automated metrology and inspection tool
  • VIS, UV
  • Simultanious wafer handling 75 - 200mm
  • SECS/GEM
  • For further information please contact us

MT3000 VIS and IR (1050-1550nm)

  • Typical Applications
    • device sealing, eutectic and glass
    • front/back side alignment
    • delamination
    • CD
    • Film Thickness
    • Defect Inspection
    • Defect Review
  • Fully automated metrology and inspection tool
  • VIS, UV, IR
  • Simultanious wafer handling 75 - 200mm
  • SECS/GEM
  • For further information please contact us

MT-100IR

  • Typical Applications
    • device sealing, eutectic and glass
    • front/back side alignment
    • delamination
    • CD
    • Overlay
    • Defect Review
  • Semi-automatic measurement and inspection tool
  • IR Illumination
  • For further information please contact us

MT50/100

  • Typical Applications
    • CD
    • Overlay
    • Film Thickness
  • Semi-automatic measurement tool
  • For further information please contact us

Contact

MueTec Europe

Headquarter

+49 89 1500 169 0

info@muetec.com

Hans-Bunte-Str. 5
80992 Munich / Germany

 

 

Manufacturing

+49 9938 9191-0

info@muetec.com

Isarauer Str. 77
94527 Aholming / Germany