Leading products in optical metrology Made in Germany

Macro Defect Inspection

High Throuput Macro Defect Inspection

MueTec’s Macro Defect Inspection products are designed for customers with many different wafer types. The system is easy to operate and does not require to write any recipes. It also enables 100% inspection of all wafer during the process of lithography with a throughput that is equal to, or faster that of a lithography cluster. In consequence, we enable our customers to move from sample inspection to inspection of all wafer and from manual inspection by operators to a statistically reliable, automated inspection process. Our tools can easily be setup without using much floor space. Low acquisition and operating costs guarantee a fast return on invest.

Here you can see an example of resist failure and an example resist streaks at lithography.

 

SIGNIFICANT ADVANTAGES

Enabling 100% wafer inspection at lithography

  • Throughput 200 wafer per hour
  • No recipe required for ease of use
  • Replaces manual inspection
  • Simulaneous wafer frontside and backside inspection
  • Highly cost effective solution for fast return on inves

 

 

Products

muetec-argos-200.jpg

Argos 150, Argos 200
200mm Wafer Macro Defect Inspection

Key Features:

Simultaneous bright- and darkfield front and backside inspection

Unique, optimized wafer handling for a throughput 200 wafer per hour

No recipe required for ease of use:
Enables productivity gains through minimum recipe customization
Ideal for fabs and packaging areas with many different devices & die sizes
No knowledge about geometry and physical parameters needed
Die layout data is not necessary
Recognition of active die area and EBR zone
Different sensitivities for different wafer areas
Avoiding false positives at zone transitions
Automatic adjustment of light intensity 
Reflectivity of inspected layer is not necessary
Automatic defect recognition parameters by adaptive software algorithm

Simulaneous wafer frontside and backside inspection

Highly cost effective solution for fast return on invest

Patented wafer alignment

Data aquisition perfectly balanced to mechanical movements

muetec-argos-300.jpg

Argos 300
200mm/300mm Wafer Macro Defect Inspection

Key Features

300 mm FOUP based handling

Data acquisition perfectly balanced to mechanical movements

Simultaneous bright- and darkfield front and backside inspection

Modular design with 1 – 3 process chambers, depending on throughput requirements 

No recipe required for ease of use:
Enables productivity gains through minimum recipe customization
Ideal for fabs and packaging areas with many different devices & die sizes
No knowledge about geometry and physical parameters needed
Die layout data is not necessary
Recognition of active die area and EBR zone
Different sensitivities for different wafer areas
Avoiding false positives at zone transitions
Automatic adjustment of light intensity 
Reflectivity of inspected layer is not necessary
Automatic defect recognition parameters by adaptive software algorithm

 

 

High Resolution Macro Defect Inspection

For customers with higher resolution requirements, MueTec provides a high resolution macro defect inspection solution down to 1µm.  

 

SIGNIFICANT ADVANTAGES

  • Recipe-less algorithm: Ideal for wafer fabs with many different product types
  • Cost effective - replaces manual inspection
  • Two simultaneous illumination modes (bright field, dark field)
  • Throughput of 50 wph at 2µm/pixel resolution
  • 300mm FOUP or 200mm SMIF version available

 

 

Products

rembrandt200.jpg

Rembrandt 200 / 300
200mm MEMS inspection and metrology system (SMIF)

Typical Applications

Macro defect inspection of 200mm and 300mm wafer

Features

200mm SMIF or 300 mm FOUP based handling

Data acquisition perfectly balanced to mechanical movements

Illumination: Bright and darkfield, LED based

Black/white and colored image of sample

Modular system architecture results in small footprint

Design allows addition of 3rd module and 4th FOUP

Throughput optimized & balanced system integration avoids bottlenecks

 

 

Contact

MueTec Europe

Headquarter

+49 89 1500 169 0

info@muetec.com

Hans-Bunte-Str. 5
80992 Munich / Germany

 

 

Manufacturing

+49 9938 9191-0

info@muetec.com

Isarauer Str. 77
94527 Aholming / Germany