We help you to find the right tool
Closed frame tools
|
Application |
Metrology |
Inspection |
Defect review |
Full automation |
SECS/GEM 300 |
|
|
wafer |
✓ |
- |
- |
✓ |
✓ |
|
|
wafer |
✓ |
- |
- |
✓ |
✓ |
|
|
wafer |
✓ |
- |
- |
✓ |
✓ |
|
|
wafer |
✓ |
✓ |
✓ |
✓ |
✓ |
|
|
framed wafer |
- |
✓ |
✓ |
✓ |
✓ |
|
|
wafer |
- |
✓ |
✓ |
✓ |
✓ |
|
|
framed wafer |
- |
✓ |
✓ |
✓ |
✓ |
|
|
wafer |
- |
✓ |
✓ |
✓ |
✓ |
|
|
mask |
- |
✓ |
✓ |
✓ |
✓ |
|
|
wafer |
- |
(✓) |
- |
✓ |
✓ |
|
|
mask |
✓ |
- |
- |
✓ |
✓ |
Open frame tools
|
Application |
Metrology |
Inspection |
Inspection review |
Film thickness (FT) |
Infrared metrology |
Handling |
|
|
wafer |
✓ |
✓ |
(✓) |
(✓) |
- |
Robot |
|
|
wafer |
✓ |
✓ |
(✓) |
- |
VIS+IR combination |
Robot |
|
|
wafer |
✓ |
- |
- |
(✓) |
- |
Manual |
|
|
mask |
✓ |
- |
- |
- |
- |
Manual |
|
|
mask |
(✓) |
✓ |
✓ |
- |
- |
Manual |
|
|
mask |
(✓) |
✓ |
✓ |
- |
- |
Robot |
* Tools can be equipped optionally with SECS/GEM 200 interface
(✓) Checkmark in brackets means optionally available
