IRIS 2100
MT technology
The MT systems are the first generation of metrology and inspection tools and based on an open frame design for high flexibility and accessibility. Tool application field varies from metrology and inspection in light range from UV, visible and infrared. The tools are available in semi-automated version, typically used in semiconductor development area as well as fully automated version for production area. With the special Infrared version we enable the customer to inspect silicon or GaAs wafers and other substrates with respect to sealing and device defects.
Used in:
Semiconductor manufacturing - Front-END
Key differences:
Open frame tool; fully-automated forwafer sizes up to 200mm
Key Features:
Metrology and Inspection from wafer with visible and infrared illuminations
Product highlights
- semi-automatic
- typical application: MEMS inspection and metrology system
- open tool architecture
- robot-based mask loading and unloading
- optical components optimised for infrared wavelength range
- high resolution infrared camera
- combination of infrared and visible light inspection
- sealing inspection for MEMS
- device defect inspection
- wafer size up to 8 inch
Your contacts
Arne Holland
Head of Sales, Service and Applications
