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UV@365nm Illumination UV-line illumination @365 nm wavelength is an option of MueTec tools to enhance the resolution of submicron structures, enhance image contrast and CD measurement performance. UV-light is useful for both incident and transmitted light applications. Optional for: MueTec 50 MueTec 100 MueTec 2000 MueTec 3000 MueTec <M5k> WI Illumination Transmitted Light Illumination DUV@248 Illumination Incident Light Illumination UV@365nm Illumination