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Transmitted Light Illumination Illumination path for transparent substrates such as masks and transparent wafers or MEMS. The brightness level is adjusted automatically via software to a user predefined level. Included in: MueTec <M5k> WI Optional for: MueTec 50 MueTec 100 MueTec 2000 MueTec 3000 Illumination Transmitted Light Illumination DUV@248 Illumination Incident Light Illumination UV@365nm Illumination