The Nanostar Software supports SECS GEM customized to the high demands of our customer.
SECS GEM is a need especially for highly automated Wafer Fabs.
MueTec 3000 tool is featuring a NONSTOP operation where operators only have to place cassettes onto the system.
MueTec 3000 recognizes new cassettes on the system, wafers are randomly, job depending or by factory host (SECS GEM) selected and automatically loaded to the Barcode Reader.
The factory host selects the job depending on the barcode via SECS GEM.
During the measurement of one wafer the next wafer is prepared parallel by the robot.
Measurement data are transferred back to the factory host via SECS GEM.
Complete operation is NONSTOP.
