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Handling System Dual arm robot Integrated prealigner 4 - 8 inch capable Flat or notch detection 3 stations 4 - 8 inch    -  Size detection    -  Placement detection Edge grip as option Extra antivibration level High handling precision    -  dx, dy < 100 µm    -  Angle < 0.1 degree Included in: MueTec 3000 Optional for: MueTec 2000

Wafer during prealignment