• VIS, UV or DUV illumination
• 8 bit or 16 bit grey value resolution
• high efficiency
• high spatial resolution

Realtime camera corrections:

• Pixel efficiency:
  -  correction for different efficiency behaviour of each individual
     camera pixel
  -  CCD pixel noise is reduced by approx. 90%
• Shading (vignetting):
  -  correction for light path and camera vignetting and other illumination 
     inhomogeneities
  -  reduces shading by 90%

Benefits:

• Improved measurement repeatability
• High throughput
• Fully automated measurement and operation