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Antivibration Base Frame Dual antivibration decoupling system Base Frame Stainless steel Cleanroom class 1 Dimension according to SEMI      -  height        -  footwell Dual antivibration decoupling system Passive system operating with air pressure 8 dampers Each damper separately adjustuble 220 x 100 x 80 cm Included in: MueTec 2000 MueTec 3000 MueTec <M5k> WI Optional for: MueTec 50 MueTec 100