MueTec: Upgrades

Upgrade Leica LWM series

Leica LWM200 / LWM 250UV Mask CD Metrology Tools

MueTec is the OEM (Original Equipment Manufacturer) of the Leica LWMs including hard- and software, excluding the optics.
Due to a mutual agreement between MueTec and Leica, MueTec has taken over the responsibility for Leica LWM tool upgrades since the end of 2004, valid for LWMs with VIS and UV illumination (DUV LWMs are excluded).
Most of the LWM equipments - disregarding their age - can be upgraded to state-of-the-art tools.

LWM200 / LWM 250 UV Upgrade advantages

Better performance:
- CD repeatability
- dots and holes repeatability
- X-Y bias reduction
- screen linearity
Throughput enhancement >30% with usage of:
- stage correction software
- focus series with multiple CD measurements
- new Pattern Finder
Higher reliability with:
- new finder technology
- new PC technology
Higher flexibility using the:
- new MueTec NanoStar software
- based on Win NT, Win 2000

The resolution of the digital CCD camera has been increased from 8 bit (256) to 16 bit (65536) grey values. The software executes real time corrections for pixel efficiency and shading.

New Measurement Modes

The focus series mode allows multiple measurements in the same field of view. This leads to a substantial enhancement of throughput for all kind of multiple measurements in the same field of view. The measurement time for the second and each following feature is < 100 msec.
The dots & holes measurement is working with a new, improved algorithm.
Repeatability enhancement of typically 50% - 70% is possible. In addition, the software calculates area, area loss and corner rounding.
The CD measurement algorithm has been improved further, resulting in a repeatability enhancement of typically 20% - 40%.
OPC measurement with automatical detection and measurement of the OPC feature type such as serifs or hammerheads.
Line Edge Roughness (LER) measurements are executed parallel to CD measurements. Butting error measurement is supported. LER results are 3sd and range. The typical repeatability is 2...3 nm.
Stage correction software
New stage correction software leads to a typical stage accuracy improvement of 30% - 40%. Stage correction teaching either on LWM calibration masks or customer masks is possible.
Other new software features
- easy job rotation possible with one click only: 90°, 180°, 270°
- number of macro variables extended from 200 to 500
- number of macro lines extended from 2000 to 7000
- and more …

By upgrading , you can reduce cost of ownership and extend the life time of your existing LWM tools even with a low investment budget . Please ask for more information.