Mask

Wafer

MEMS

Customized Tools

Upgrades

OEM Products

Used Equipment

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Take Advantage of MueTec’s Experience MueTec has a long-standing successful cooperation with semiconductor global main-players for wafer, masks and MEMS.

Mask Wafer MEMS CD Overlay FT I&R DI MueTec 50  MueTec 100  Leica LWM 100 MueTec 2000  MueTec 3000  Leica LWS 3000 MueTec <M5k> WI  Leica LWM 500WI x = included. [x] = optional. CD = Critical Dimension (Linewidth Measurement), FT = Film Thickness, I&R = Inspection & Review, DI = Defect Inspection Customized Tools Our tools are designed and build based on your, the high-tech industry customer’s, individual demands. The complete hardware and software design, manufacturing, and service is done by MueTec – all in one hand !

Can’t find what you need? We can build you a customized tool, which exactly fits your needs. If you have problems finding what you need,  try browsing through our products by looking for the technology you need. Technology:Find out about our new Pattern Finder MueTec is cooperating successfully with Vistec Semiconductor Systems GmbH (formerly Leica Microsystems Semiconductor) in this field since 1995. Since 2001 MueTec also uses Leica DUV optics in a microscope platform, invented by MueTec and offering highest mechanical stability and Z-resolution for metrology.