MueTec solutions include customized applications for:
- Infrared (IR) defect inspection on wafers, SOI wafers, MEMS, solar cells ...
- IR Overlay measurement (TOP to BOTTOM)
- IR CD measurement
- IR sealing inspection, e.g. acceleration sensors for automotive industries
- Wafer to wafer inspection, large dies, unlimited die size
- Inspection & CD measurement of ceramics
- Inspection of lenses
- CD measurement / distance measurement / film thickness measurement
on air pressure sensors for automotive industries
- Overlay measurement on tranparent wafers
- LCD CD measurement and defect inspection
- Large area mask CD measurement & defect inspection (up to 600x600mm)
- Overlay registration measurement
- Film thickness measurements
- Z and Z-profile measurements
- Incident and transmitted light application
- Customized automation packages, e.g.
- handling system,
- motorized scanning stages,
- substrate chuck holders
- and more …
