Micro-Electro-Mechanical-Systems - short: MEMS - can be defined as a technology which is using common Silicon processes to manufacture miniaturized mechanical and electro-mechanical devices. In contrast to the common IC processes in MEMS technology CD's vary from well below 1µm to few milimeters. Based on our IC manufacturing experience we are able to address the MEMS metrology requirements as well. Especially our Infrared Inspection & Measurement system addresses many aspects of MEMS metrology.
- Film Thickness Measurement, CD Measurement and Defect Inspection and Review very similar to the classical IC manuafturing process are used.
- Due to the three dimensional character of many MEMS devices we have developed a Infrared Inspection & Measurement tool with which we can investigate layer per layer.