Rapid progress in material science made applications on a industrial base possible - like TV or in cars. Since the manufacturing process of LED's or OLED's is very similar to the IC manufacturing all relevant metrology and measurement priciples are used as well.
- Critical Dimension or CD Measurement like metal lead line width
- Although Overlay is not as critical as in IC manufacturing there are still measurement necessary.
- Film thickness measurement of transparent films like Oxide, Nitride or Photo resist
- Defects and their reduction play a important role in the overall profitability of a manufacturing line. Therefore Defect Inspection and Review are important tools for engineers to increase yield.
