Feature Overview

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MueTec 50 MueTec 100 MueTec 2010 MueTec 3000 MueTec 5500
INM 200 microscope STANDARD STANDARD STANDARD STANDARD ENHANCED
Incident light illumination OR TRANSIMTTED LIGHT STANDARD STANDARD STANDARD STANDARD
Transmitted light illumination OR INCIDENT LIGHT OPTION OPTION OPTION STANDARD
UV @ 365nm illumination - OPTION OPTION OPTION OPTION
DUV @ 248nm illumination - OPTION OPTION OPTION OPTION
Infrared (1050nm - 1550nm) OPTION OPTION OPTION OPTION OPTION
Laser autofocus OPTION OPTION STANDARD STANDARD STANDARD
Image autofocus STANDARD STANDARD STANDARD STANDARD STANDARD
6-folded nosepiece STANDARD STANDARD STANDARD STANDARD STANDARD
Motorized Z-drive STANDARD STANDARD STANDARD STANDARD STANDARD
Rotatable camera OPTION OPTION STANDARD STANDARD STANDARD
Positioning stage OPTION OPTION STANDARD STANDARD STANDARD
Customized sample holder OPTION OPTION OPTION OPTION OPTION
CD software STANDARD STANDARD STANDARD STANDARD STANDARD
Overlay software OPTION OPTION OPTION STANDARD OPTION
Defect inspection software OPTION OPTION OPTION OPTION OPTION
Defect review software OPTION OPTION OPTION OPTION OPTION
SECS / GEM software OPTION OPTION OPTION OPTION OPTION
KLARF, TSK interfaces OPTION OPTION OPTION OPTION OPTION
Maintenance software STANDARD STANDARD STANDARD STANDARD STANDARD
Customized software OPTION OPTION OPTION OPTION OPTION
Light tower OPTION OPTION STANDARD STANDARD STANDARD
Antivibration base frame OPTION OPTION STANDARD STANDARD STANDARD
Rack (PC, media controler) STANDARD OPTION STANDARD STANDARD STANDARD
Barcode reader - - - OPTION OPTION
Robot - - - STANDARD OPTION
Film thickness device OPTION OPTION OPTION OPTION OPTION
3-D surface measurement OPTION OPTION OPTION OPTION OPTION

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